(1) 1.5-µm-wavelength partially strain-compensated
GaInAsP/InP 5-layered quantum-wire lasers with the wire width
of 23 nm in the period of 80 nm were realized for the first
time by electron beam lithography, CH4/H2-reactive
ion etching and organometallic vapor-phase-epitaxial regrowth.
The threshold current density of 774 A/cm2
and differential quantum efficiency of 40 % were obtained
under a pulsed condition at room temperature. From measurement
of spontaneous emission spectra, the blue shift at the peak
wavelength was 38 meV, which was much larger than a calculated
value, and the spontaneous emission spectral width was almost
constant at temperatures between 103 K and 253 K, indicating
a lateral quantum confinement effect. Finally, the spontaneous
emission efficiency below the threshold was almost comparable
to that of the Q-Film lasers up to 85°C, that revealed
low-damage property of the etched/regrown interfaces.
(2) GaInAsP/InP partially strain-compensated multiple-quantum-wire
lasers with the wire widths of 18 nm and 27 nm in the period
of 80 nm were also realized. Size fluctuations of these quantum-wire
structures were measured by scanning electron microscope views,
from which the standard deviation was obtained to be less
than 2 nm. The differential quantum efficiencies of these
quantum-wire lasers were almost the same as that of the 5-quantum-well
lasers at room temperature. From EL spectra of various wire
widths lasers, a larger energy blue shift than that from a
simple analysis model was observed, which can be attributed
to residual compressive strain between the active region and
surrounding InP layer.
(3) Wire width dependence of the large energy blue shift in
GaInAsP/InP partially strain-compensated vertically-stacked
multiple-quantum-wire structures is accurately explained for
the first time using an 8 band k・p theory without any fitting
parameter. Variations of energy levels due to a non-uniform
strain profile in stacked quantum-wires are calculated to
be less than 2.4 meV. It is found that unlike quantum films,
the energy-band structures of strained quantum-wires depend
on the amount of strain-compensation in barrier regions and
on the number of wire layers in the vertical stack.
(4) A RT-CW operation of GaInAsP/InP quantum-wire lasers (23
nm wide, 5 stacked quantum-wires) and quantum-wirelike lasers
(43 nm wide, 5 stacked wires) fabricated by electron beam
lithography, CH4/H2-reactive ion etching and 2-step organometallic
vapor-phase-epitaxial growth processes was realized for the
first time. Lifetime measurement of this quantum-wire laser
was also carried out at RT-CW condition, and no noticeable
degradation in light output was observed even after 2,000
hours.
(5) High-performance 1.55 µm wavelength GaInAsP/InP
strongly index-coupled and gain-matched distributed feedback
lasers with periodic wirelike active regions were fabricated
by electron beam lithography, CH4/H2-reactive ion etching,
and organometallic vapor-phase epitaxial regrowth. This type
of DFB laser with wirelike active regions can operate at very
low threshold because of its strong index coupling and the
reduction of the active medium volume. However, this type
of DFB laser consists of a larger portion of etched/regrowth
interfaces than conventional DFB laser. Therefore the reliability
test of lasing characteristics is very important. A CW life
test was carried out. No degradations in lasing characteristics
were observed after an aging time of 8200 hours at a bias
current of around 10 times the threshold.
(6) By using a lateral quantum confinement effect, a new
type of distributed reflector laser consisting of a wirelike
active section and a passive DBR section with quantum-wire
structure was demonstrated for the first time. In theoretical
analysis, a waveguide loss of a DBR structure increases by
only 1 cm-1 compared with the value in case of no active layers.
Using this waveguide structure as a passive DBR section, a
maximum reflectivity of 97 % would be obtained for the wire
width of 40 nm and DBR section length of 200 µm. Threshold
current of 15.4 mA, which corresponds to the threshold current
density of 320 A/cm2, was obtained for the active section
length of 240 µm, the passive DBR section length of
440 µm and the stripe width of 20 µm with both
facets cleaved. The differential quantum efficiency from the
front facet was 16.2 % and the rear facet was 0.57 %, hence
an asymmetric output ratio of 28 was realized. This strong
asymmetric output characteristic is a specific property of
the DR laser. For a lower threshold and a single-mode operation,
narrow stripe DR laser was also fabricated. As a result, Threshold
current of 7.6 mA and differential quantum efficiency from
the front facet of 5.1 % were obtained under RT-CW condition
for the active section length of 310 µm, the passive
section length of 270 µm and the stripe width of 3 µm.
A single-mode operation with sub-mode suppression ratio (SMSR)
of 40 dB was achieved at relatively low bias level (I=1.2Ith). |
(1) 1.3µm-wide narrow mesa stripe DR lasers consisting
of first-order vertical grating (VG)-DFB and first-order deeply
etched DBR mirrors were realized for the first time by one-step
epitaxy and fine vertical etching processes. A threshold current
of 3.6mA for the active region length of 210µm and an
SMSR=35dB were obtained.
(2) By use of vertical grating DFB structure, it is clarified
that structural birefringence can be drastically reduced. The
grating coupling coefficient can also be made polarization insensitive
by adjusting the grating depth.
(3) Novel semiconductor laser structure, such as, membrane laser
which has the Benzocyclobutene (BCB) cladding layers, enables
to increase optical confinement into active layer due to a large
refractive index difference between active layer and cladding
layers. A room temperature continuous wave operation of membrane
DFB laser consisting of deeply etched single-quantum-well wirelike
active regions was already demonstrated. In order to realize
single mode and low threshold operation of membrane DFB laser,
buried heterostructure (BH) was innovated by slightly changing
the fabrication process. A threshold pump power of 1.5 mW and
a sub-mode suppression-ratio of 42 dB were obtained for a 142
nm-thick semiconductor membrane core layer with a cavity length
of 120 µm and a stripe width of 2 µm under room-temperature
continuous wave optical pumping. The corresponding threshold
for current injection was roughly estimated to be 27 µA.
(4) We have realized membrane BH-DFB laser arrays by arranging
the laser cavities (10 µm spaced 15 elements with 5 different
grating periods). A total wavelength span of 72 nm was achieved
with a small lasing wavelength fluctuation of up to ±1.2 nm
at RT-CW condition under optical pumping. From this value, membrane
thickness fluctuation was estimated to be ±0.4 nm. Threshold
pump power of 3.4 mW and SMSR of 45 dB were achieved in a typical
device.
(5) Membrane BH-DFB laser arrays with different grating periods
and different stripe width were successfully fabricated using
EB lithography, CH4/H2-RIE and OMVPE. The possibility for a
laser array covering a wide wavelength range of 51 nm with a
wavelength controllability of less than 0.8 nm (100GHz) was
demonstrated. This multi-wavelength laser array may be a candidate
for a coarse WDM system or a wavelength conversion device between
LAN and MAN. |